Very high κ and high density TiTaO MIM capacitors for analog and RF applications

• Main Authors: Chiang, K.C., Chin, A., Lai, C.H., Chen, W.J., Cheng, C.F., Hung, B.F., Liao, C.C.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/84350

10.1109/.2005.1469213