Formation of FeSi and FeSi2 films from cis-Fe(SiCl3)2(CO)4 by MOCVD -precursor versus substrate control
Inorganica Chimica Acta
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Main Authors: | Zybill, C.E., Huang, W. |
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Other Authors: | CHEMISTRY |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/93845 |
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Institution: | National University of Singapore |
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