Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

10.1016/S0040-6090(98)01332-7

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Bibliographic Details
Main Authors: Yoon, S.F., Rusli, Ahn, J., Zhang, Q., Yang, C.Y., Yang, H., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96172
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Institution: National University of Singapore
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Summary:10.1016/S0040-6090(98)01332-7

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