Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

10.1016/S0040-6090(98)01332-7

Saved in:
Bibliographic Details
Main Authors: Yoon, S.F., Rusli, Ahn, J., Zhang, Q., Yang, C.Y., Yang, H., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96172
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/96172

Similar Items