Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

10.1016/S0040-6090(98)01332-7

Saved in:

Bibliographic Details
Main Authors:	Yoon, S.F., Rusli, Ahn, J., Zhang, Q., Yang, C.Y., Yang, H., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96172
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-96172
record_format	dspace
spelling	sg-nus-scholar.10635-961722023-10-26T08:05:49Z Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD Yoon, S.F. Rusli Ahn, J. Zhang, Q. Yang, C.Y. Yang, H. Watt, F. PHYSICS 10.1016/S0040-6090(98)01332-7 Thin Solid Films 340 1 62-67 THSFA 2014-10-16T09:20:22Z 2014-10-16T09:20:22Z 1999-02-26 Article Yoon, S.F., Rusli, Ahn, J., Zhang, Q., Yang, C.Y., Yang, H., Watt, F. (1999-02-26). Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD. Thin Solid Films 340 (1) : 62-67. ScholarBank@NUS Repository. https://doi.org/10.1016/S0040-6090(98)01332-7 00406090 http://scholarbank.nus.edu.sg/handle/10635/96172 000079353000012 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/S0040-6090(98)01332-7
author2	PHYSICS
author_facet	PHYSICS Yoon, S.F. Rusli Ahn, J. Zhang, Q. Yang, C.Y. Yang, H. Watt, F.
format	Article
author	Yoon, S.F. Rusli Ahn, J. Zhang, Q. Yang, C.Y. Yang, H. Watt, F.
spellingShingle	Yoon, S.F. Rusli Ahn, J. Zhang, Q. Yang, C.Y. Yang, H. Watt, F. Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD
author_sort	Yoon, S.F.
title	Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD
title_short	Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD
title_full	Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD
title_fullStr	Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD
title_full_unstemmed	Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD
title_sort	deposition of polymeric nitrogenated amorphous carbon films (a-c:h:n) using electron cyclotron resonance cvd
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96172
_version_	1781786400186695680

Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

Similar Items