Proton beam writing

Proton beam writing

10.1016/S1369-7021(07)70129-3

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Bibliographic Details
Main Authors:	Watt, F., Breese, M.B.H., Bettiol, A.A., van Kan, J.A.
Other Authors:	PHYSICS
Format:	Review
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/99015
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Institution:	National University of Singapore

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