Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches
Au, Au-V solid solution, and Au-V2O5 dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for...
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| Main Authors: | , , , |
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| 格式: | Conference or Workshop Item |
| 語言: | English |
| 出版: |
2014
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| 在線閱讀: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34247356929&partnerID=40&md5=3e5d2015ff82b33352ec9f4a506314b8 http://cmuir.cmu.ac.th/handle/6653943832/5270 |
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