The electrical and mechanical properties of Au-V and Au- V2 O5 thin films for wear-resistant RF MEMS switches
To explore alternatives to the use of pure Au in Ohmic contact RF microelectromechanical switches, we have measured changes in the electrical resistivity and nanoindentation hardness of a series of sputter deposited Au-V and Au- V2 O5 thin films. Increasing V content in the Au-V alloys increases res...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2014
|
| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-43049134835&partnerID=40&md5=e4af8b9310834f2743d8f79bd35b538b http://cmuir.cmu.ac.th/handle/6653943832/5540 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Chiang Mai University |
| Language: | English |