ELECTRICAL PROPERTIES OF METAL INSULATOR SEMICONDUCTOR (MIS) STRUCTURE COMPRISE OF CARBON BASED THIN FILM ON Al2O3/Si
The electrical properties of Metal Insulator Semiconductor (MIS) structure comprise of carbon-based thin film grown on γ-Al2O3/Si have been investigated and studied. The carbon based thin film is deposited through Argon plasma DC unbalanced magnetron sputtering technique using Fe doped carb...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/20164 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |