Grating and hole-array enhanced germanium lateral p-i-n photodetectors on an insulator platform
Germanium (Ge) lateral p-i-n photodetectors with grating and hole-array structures were fabricated on a Ge-on-insulator (GOI) platform. Owing to the low threading dislocation density (TDD) in the transferred Ge layer, a low dark current of 0.279 μA was achieved at -1 V. The grating structure enha...
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Main Authors: | Zhou, Hao, Chen, Qimiao, Wu, Shaoteng, Zhang, Lin, Guo, Xin, Son, Bongkwon, Tan, Chuan Seng |
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其他作者: | School of Electrical and Electronic Engineering |
格式: | Article |
語言: | English |
出版: |
2022
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主題: | |
在線閱讀: | https://hdl.handle.net/10356/155045 |
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機構: | Nanyang Technological University |
語言: | English |
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