Ceramic pin grid array with built-in interconnects to locate TSV integrated ion trap for wire bonding-free assembly
To alleviate the heat dissipation issue of through silicon via (TSV) integrated ion trap on glass interposer, a ceramic pin grid array (CPGA) with built-in redistribution layer (RDL) is demonstrated to locate the trap directly. This patterned RDL has internal connection to the backside CPGA pin, fac...
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Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2023
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/166180 |
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Institution: | Nanyang Technological University |
Language: | English |