Study of Si-nanocrystals-based light-emitting devices

• Main Author: Chen, Tupei.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: http://hdl.handle.net/10356/16923
• Institution: Nanyang Technological University

In this project, Si nanocrystals embedded in dielectric matrix have been synthesized with the technique of Si ion implantation and plasma enhanced vapor deposition (PECVD). The resulting structure of the synthesized films embedded with nc-Si have been characterized by the techniques of transmission...