Carbon nanotube bumps for the flip chip packaging system
Carbon nanotube [CNT] interconnection bump joining methodology has been successfully demonstrated using flip chip test structures with bump pitches smaller than 150 μm. In this study, plasma-enhanced chemical vapor deposition approach is used to grow the CNT bumps onto the Au metallization lines. Th...
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Main Authors: | Yap, Chin Chong, Brun, Christophe, Tan, Dunlin, Li, Hong, Teo, Edwin Hang Tong, Baillargeat, Dominique, Tay, Beng Kang |
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其他作者: | School of Electrical and Electronic Engineering |
格式: | Article |
語言: | English |
出版: |
2013
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在線閱讀: | https://hdl.handle.net/10356/79979 http://hdl.handle.net/10220/9191 |
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機構: | Nanyang Technological University |
語言: | English |
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