Microstructure measurement of digital holography

Miniaturization is a development trend of electronics, machinery and information systems, while micro structure brought a large amount of new development for industrial and research applications, whereas, slow measuring speed and two-dimensional results of traditional micro measurement could not mee...

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Main Authors: Li, Jicheng, Tian, Ailing, Wang, Hongjun, Zhu, Xueliang, Wang, Chunhui, Liu, Bingcai, Asundi, Anand
格式: Conference or Workshop Item
語言:English
出版: 2018
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在線閱讀:https://hdl.handle.net/10356/88785
http://hdl.handle.net/10220/46971
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