Microstructure measurement of digital holography
Miniaturization is a development trend of electronics, machinery and information systems, while micro structure brought a large amount of new development for industrial and research applications, whereas, slow measuring speed and two-dimensional results of traditional micro measurement could not mee...
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Main Authors: | Li, Jicheng, Tian, Ailing, Wang, Hongjun, Zhu, Xueliang, Wang, Chunhui, Liu, Bingcai, Asundi, Anand |
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格式: | Conference or Workshop Item |
語言: | English |
出版: |
2018
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主題: | |
在線閱讀: | https://hdl.handle.net/10356/88785 http://hdl.handle.net/10220/46971 |
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機構: | Nanyang Technological University |
語言: | English |
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