High-throughput dip-pen-nanolithography-based fabrication of Si nanostructures
Si nanostructures: A new method for fabricating large-area Si nanostructures in a high-throughput fashion has been demonstrated. The procedure is based upon dip-pen nanolithography in combination with wet-chemical etching and reactive ion etching. Multipen techniques have been demonstrated for the f...
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Main Authors: | Fragala, Joseph, Zhang, Hua, Disawal, Sandeep, Elghanian, Robert, Shile, Roger, Amro, Nabil A. |
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Other Authors: | School of Materials Science & Engineering |
Format: | Article |
Language: | English |
Published: |
2012
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/95378 http://hdl.handle.net/10220/8613 |
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Institution: | Nanyang Technological University |
Language: | English |
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