Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM

10.1049/el:20010390

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Bibliographic Details
Main Authors:	Teh, W.H., Koh, L.T., Chen, S.M., Xie, J., Li, C.Y., Foo, P.D.
Other Authors:	INSTITUTE OF MICROELECTRONICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/112967
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-1129672023-10-30T22:19:27Z Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM Teh, W.H. Koh, L.T. Chen, S.M. Xie, J. Li, C.Y. Foo, P.D. INSTITUTE OF MICROELECTRONICS 10.1049/el:20010390 Electronics Letters 37 10 660-661 ELLEA 2014-11-28T08:12:48Z 2014-11-28T08:12:48Z 2001-05-10 Article Teh, W.H., Koh, L.T., Chen, S.M., Xie, J., Li, C.Y., Foo, P.D. (2001-05-10). Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM. Electronics Letters 37 (10) : 660-661. ScholarBank@NUS Repository. https://doi.org/10.1049/el:20010390 00135194 http://scholarbank.nus.edu.sg/handle/10635/112967 000168899100036 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1049/el:20010390
author2	INSTITUTE OF MICROELECTRONICS
author_facet	INSTITUTE OF MICROELECTRONICS Teh, W.H. Koh, L.T. Chen, S.M. Xie, J. Li, C.Y. Foo, P.D.
format	Article
author	Teh, W.H. Koh, L.T. Chen, S.M. Xie, J. Li, C.Y. Foo, P.D.
spellingShingle	Teh, W.H. Koh, L.T. Chen, S.M. Xie, J. Li, C.Y. Foo, P.D. Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM
author_sort	Teh, W.H.
title	Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM
title_short	Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM
title_full	Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM
title_fullStr	Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM
title_full_unstemmed	Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM
title_sort	evaluation of the performance of tan diffusion barrier against copper diffusion using sims and afm
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/112967
_version_	1781789143887511552

Evaluation of the performance of TaN diffusion barrier against copper diffusion using SIMS and AFM

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