Gate dielectric degradation mechanism associated with DBIE evolution

Annual Proceedings - Reliability Physics (Symposium)

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Bibliographic Details
Main Authors:	Pey, K.L., Ranjan, R., Tung, C.H., Tang, L.J., Lin, W.H., Radhakrishnan, M.K.
Other Authors:	INSTITUTE OF MICROELECTRONICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Breakdown Dielectric-breakdown-induced epitaxy Gate dielectric
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/115429
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-115429
record_format	dspace
spelling	sg-nus-scholar.10635-1154292024-11-09T03:27:05Z Gate dielectric degradation mechanism associated with DBIE evolution Pey, K.L. Ranjan, R. Tung, C.H. Tang, L.J. Lin, W.H. Radhakrishnan, M.K. INSTITUTE OF MICROELECTRONICS Breakdown Dielectric-breakdown-induced epitaxy Gate dielectric Annual Proceedings - Reliability Physics (Symposium) 117-121 ARLPB 2014-12-12T07:15:31Z 2014-12-12T07:15:31Z 2004 Conference Paper Pey, K.L.,Ranjan, R.,Tung, C.H.,Tang, L.J.,Lin, W.H.,Radhakrishnan, M.K. (2004). Gate dielectric degradation mechanism associated with DBIE evolution. Annual Proceedings - Reliability Physics (Symposium) : 117-121. ScholarBank@NUS Repository. 00999512 http://scholarbank.nus.edu.sg/handle/10635/115429 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Breakdown Dielectric-breakdown-induced epitaxy Gate dielectric
spellingShingle	Breakdown Dielectric-breakdown-induced epitaxy Gate dielectric Pey, K.L. Ranjan, R. Tung, C.H. Tang, L.J. Lin, W.H. Radhakrishnan, M.K. Gate dielectric degradation mechanism associated with DBIE evolution
description	Annual Proceedings - Reliability Physics (Symposium)
author2	INSTITUTE OF MICROELECTRONICS
author_facet	INSTITUTE OF MICROELECTRONICS Pey, K.L. Ranjan, R. Tung, C.H. Tang, L.J. Lin, W.H. Radhakrishnan, M.K.
format	Conference or Workshop Item
author	Pey, K.L. Ranjan, R. Tung, C.H. Tang, L.J. Lin, W.H. Radhakrishnan, M.K.
author_sort	Pey, K.L.
title	Gate dielectric degradation mechanism associated with DBIE evolution
title_short	Gate dielectric degradation mechanism associated with DBIE evolution
title_full	Gate dielectric degradation mechanism associated with DBIE evolution
title_fullStr	Gate dielectric degradation mechanism associated with DBIE evolution
title_full_unstemmed	Gate dielectric degradation mechanism associated with DBIE evolution
title_sort	gate dielectric degradation mechanism associated with dbie evolution
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/115429
_version_	1821183264118800384

Gate dielectric degradation mechanism associated with DBIE evolution

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