Simplified dual damascene process utilizing PPMSO as an insulator layer

Simplified dual damascene process utilizing PPMSO as an insulator layer

US6323125

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書目詳細資料
Main Authors:	SOO, CHOI PHENG, LOH, WYE BOON, CHAN, LAP
其他作者:	MATERIALS SCIENCE
格式:	Patent
出版:	2012
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/32603
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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