Defect engineering by surface chemical state in boron-doped preamorphized silicon
10.1063/1.2780080
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Main Authors: | Yeong, S.H., Srinivasan, M.P., Colombeau, B., Chan, L., Akkipeddi, R., Kwok, C.T.M., Vaidyanathan, R., Seebauer, E.G. |
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Other Authors: | CHEMICAL & BIOMOLECULAR ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/63693 |
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Institution: | National University of Singapore |
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