A simple approach to sub-100 nm resist nanopatterns with a high aspect ratio
10.1088/0960-1317/23/3/035038
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Main Authors: | Zong, B.Y., Ho, P., Han, G.C., Chow, G.M., Chen, J.S. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/64802 |
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Institution: | National University of Singapore |
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