A dual-metal gate integration process for CMOS with sub-1-nm EOT HfO2 by using HfN replacement gate
10.1109/LED.2004.832535
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Main Authors: | , , , , , , , , |
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Other Authors: | |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81863 |
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Institution: | National University of Singapore |