Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

10.1109/VLSIT.2008.4588603

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Main Authors:	Wang, X.P., Yu, H.Y., Yeo, Y.-C., Li, M.-F., Chang, S.-Z., Cho, H.-J., Kubicek, S., Wouters, D., Groeseneken, G., Biesemans, S.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84339
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84339
record_format	dspace
spelling	sg-nus-scholar.10635-843392023-10-29T23:17:33Z Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme Wang, X.P. Yu, H.Y. Yeo, Y.-C. Li, M.-F. Chang, S.-Z. Cho, H.-J. Kubicek, S. Wouters, D. Groeseneken, G. Biesemans, S. ELECTRICAL & COMPUTER ENGINEERING 10.1109/VLSIT.2008.4588603 Digest of Technical Papers - Symposium on VLSI Technology 162-163 DTPTE 2014-10-07T04:51:33Z 2014-10-07T04:51:33Z 2008 Conference Paper Wang, X.P., Yu, H.Y., Yeo, Y.-C., Li, M.-F., Chang, S.-Z., Cho, H.-J., Kubicek, S., Wouters, D., Groeseneken, G., Biesemans, S. (2008). Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme. Digest of Technical Papers - Symposium on VLSI Technology : 162-163. ScholarBank@NUS Repository. https://doi.org/10.1109/VLSIT.2008.4588603 9781424418053 07431562 http://scholarbank.nus.edu.sg/handle/10635/84339 000266975800082 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/VLSIT.2008.4588603
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, X.P. Yu, H.Y. Yeo, Y.-C. Li, M.-F. Chang, S.-Z. Cho, H.-J. Kubicek, S. Wouters, D. Groeseneken, G. Biesemans, S.
format	Conference or Workshop Item
author	Wang, X.P. Yu, H.Y. Yeo, Y.-C. Li, M.-F. Chang, S.-Z. Cho, H.-J. Kubicek, S. Wouters, D. Groeseneken, G. Biesemans, S.
spellingShingle	Wang, X.P. Yu, H.Y. Yeo, Y.-C. Li, M.-F. Chang, S.-Z. Cho, H.-J. Kubicek, S. Wouters, D. Groeseneken, G. Biesemans, S. Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
author_sort	Wang, X.P.
title	Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
title_short	Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
title_full	Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
title_fullStr	Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
title_full_unstemmed	Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
title_sort	understanding and prediction of ewf modulation induced by various dopants in the gate stack for a gate-first integration scheme
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84339
_version_	1781784443059437568

Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

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