Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
10.1109/VLSIT.2008.4588603
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Main Authors: | Wang, X.P., Yu, H.Y., Yeo, Y.-C., Li, M.-F., Chang, S.-Z., Cho, H.-J., Kubicek, S., Wouters, D., Groeseneken, G., Biesemans, S. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/84339 |
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Institution: | National University of Singapore |
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