Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

• Main Authors: Wang, X.P., Yu, H.Y., Yeo, Y.-C., Li, M.-F., Chang, S.-Z., Cho, H.-J., Kubicek, S., Wouters, D., Groeseneken, G., Biesemans, S.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84339
• Institution: National University of Singapore

10.1109/VLSIT.2008.4588603