Ni(Pt) alloy silicidation on (100) Si and poly-silicon lines

بواسطة Pey, Kin Leong, Lee, Pooi See, Mangelinck, D.
منشور في 2013

Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

بواسطة Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L.
منشور في 2014

Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

بواسطة Pey, Kin Leong, Lee, Pooi See, Mangelinck, D., Osipowitcz, T.
منشور في 2013

In situ XRD analysis of Ni(Pt)/Si(100) reactions in low temperature regime ≤400 °C

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chan, L.
منشور في 2014

On the morphological changes of Ni- and Ni(Pt)-silicides

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Chi, D.Z., Osipowicz, T.
منشور في 2014

Formation and stability of Ni(Pt) silicide on(100)Si and (111)Si

بواسطة Mangelinck, D., Dai, J.Y., Lahiri, S.K., Ho, C.S., Osipowicz, T.
منشور في 2014

In situ XRD analysis of Ni(Pt)/Si(100) reactions in low temperature regime ≤400°C

بواسطة Mangelinck, D., Chan, L., Lee, Pooi See, Pey, Kin Leong, Ding, Jun
منشور في 2013

On the morphological changes of Ni- and Ni(Pt)-silicides

بواسطة Mangelinck, D., Osipowicz, T., Lee, Pooi See, Pey, Kin Leong, Chi, Dong Zhi
منشور في 2012

Layer inversion of Ni(Pt)Si on mixed phase Si films

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Osipowicz, T., See, A.
منشور في 2014

Layer inversion of Ni(Pt)Si on mixed phase Si films

بواسطة Osipowicz, T., See, A., Mangelinck, D., Lee, Pooi See, Pey, Kin Leong, Ding, Jun
منشور في 2012

Comparative study of current-voltage characteristics of Ni and Ni(Pt)- alloy silicided p+/n diodes

بواسطة Mangelinck, D., Lahiri, S. K., Chi, Dong Zhi, Lee, Pooi See, Pey, Kin Leong
منشور في 2012

Improved NiSi salicide process using presilicide N2 + implant for MOSFETs

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Wee, A.T.S., Chan, L.
منشور في 2014

Comparative study of current-voltage characteristics of Ni and Ni(Pt)-alloy suicided p+/n diodes

بواسطة Chi, D.Z., Mangelinck, D., Lahiri, S.K., Lee, P.S., Pey, K.L.
منشور في 2016

Micro-RBS study of nickel silicide formation

بواسطة Seng, H.L., Osipowicz, T., Lee, P.S., Mangelinck, D., Sum, T.C., Watt, F.
منشور في 2014

Micro-RBS study of nickel silicide formation

بواسطة Lee, Pooi See, Sum, Tze Chien, Seng, H. L., Osipowicz, T., Mangelinck, D., Watt, F.
منشور في 2013

Improved NiSi salicide process using presilicide N2+ implant for MOSFETs

بواسطة Wee, A. T. S., Chan, L., Mangelinck, D., Lee, Pooi See, Pey, Kin Leong, Ding, Jun
منشور في 2012

New salicidation technology with Ni(Pt) alloy for MOSFETs

بواسطة Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chi, D.Z., Chan, L.
منشور في 2014

New salicidation technology with Ni(Pt) alloy for MOSFETs

بواسطة Mangelinck, D., Chan, L., Lee, Pooi See, Pey, Kin Leong, Ding, Jun, Chi, Dong Zhi
منشور في 2012

Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides

بواسطة Mangelinck, D., Osipowicz, T., See, A., Lee, Pooi See, Pey, Kin Leong, Shen, Zexiang, Ding, Jun
منشور في 2012

Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides

بواسطة Lee, P.S., Mangelinck, D., Pey, K.L., Shen, Z.X., Ding, J., Osipowicz, T., See, A.
منشور في 2014