CMOS-fabricated ring surface ion trap with TSV integration
We present the design, fabrication, and test of ring surface trap on 12-inch wafers with a CMOS process. The design is based on Through Silicon Vias (TSV) interconnects. Up to 200 ions were loaded and cooled; preliminary compensations of electrostatic potential imperfections show that rotational sym...
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Main Authors: | Zhao, Peng, Lim, Yu Dian, Li, Hong Yu, Likforman, Jean-Pierre, Guidoni, Luca, Desormeaux, Lilay Gros, Tan, Chuan Seng |
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其他作者: | School of Electrical and Electronic Engineering |
格式: | Conference or Workshop Item |
語言: | English |
出版: |
2024
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主題: | |
在線閱讀: | https://hdl.handle.net/10356/175533 |
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