Device parameters characterization with the use of EBIC

• Main Author: Oka Kurniawan
• Other Authors: Ong Keng Sian, Vincent
• Format: Theses and Dissertations
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/41843
• Institution: Nanyang Technological University

The performance of bipolar and photodiode devices is determined by the transport properties of the minority carriers, such as the minority carrier diffusion lengths and the surface recombination velocities. The Electron Beam Induced Current (EBIC) technique of the Scanning Electron Microscopy (SEM)...