Choice of generation volume models for electron beam induced current computation
The spatial distribution of the electron-hole pairs generated by the electron beam is commonly called the generation volume or interaction volume. The generation volume affects the electron beam-induced current (EBIC) profile. This effect of the generation volume on the EBIC profile is particula...
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Main Authors: | Ong, Vincent K. S., Kurniawan, Oka. |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Article |
Language: | English |
Published: |
2010
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/79317 http://hdl.handle.net/10220/6305 |
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Institution: | Nanyang Technological University |
Language: | English |
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