Modeling and simulation for the distribution of slurry particles in chemical mechanical polishing

• Main Authors: Nguyen, N. Y., Tian, Yebing, Zhong, Zhao Wei
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2016
• 主題: Chemical mechanical polishing; Computational fluid dynamic
• 在線閱讀: https://hdl.handle.net/10356/85031; http://hdl.handle.net/10220/40943
• 機構: Nanyang Technological University

Slurry plays an important role in the material removal of chemical mechanical polishing (CMP). However, the behavior of abrasive particles of the slurry in the interface between the wafer and the pad during CMP is not fully understood. In this paper, a new computational fluid dynamic (CFD) model was...