Pulse electroplating of copper film : a study of process and microstructure
Copper films with high density of twin boundaries are known for high mechanical strength with little tradeoff in electrical conductivity. To achieve such a high density, twin lamellae and spacing will be on the nanoscale. In the current study, 10 microm copper films were prepared by pulse electrodep...
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Main Authors: | Zhang, X., Tu, K. N., Chen, Z., Tan, Y. K., Wong, Chee C., Mhaisalkar, Subodh Gautam, Li, X. M., Tung, Chih Hang, Cheng, C. K. |
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Other Authors: | School of Mechanical and Aerospace Engineering |
Format: | Article |
Language: | English |
Published: |
2012
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Online Access: | https://hdl.handle.net/10356/94840 http://hdl.handle.net/10220/8115 |
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Institution: | Nanyang Technological University |
Language: | English |
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