Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers
In this work, piezoelectric zinc oxide (ZnO) thin films are deposited under different deposition conditions using RF magnetron sputtering method. The influence of RF power, O2/(Ar + O2) gas ratio and sputtering pressure on the deposition rate, crystalline structures, surface roughness and compositio...
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/99844 http://hdl.handle.net/10220/11027 |
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| Institution: | Nanyang Technological University |
| Language: | English |