High aspect ratio channels in glass and porous silicon
10.1016/j.nimb.2016.12.025
Saved in:
Main Authors: | H.D. Liang, Z.Y. Dang, J.F. Wu, J.A. van Kan, S. Qureshi, M.D. Ynsa, V. Torres-Costa, A. Maira, T.V. Venkatesan, M.B.H. Breese |
---|---|
Other Authors: | NUS NANOSCIENCE & NANOTECH INITIATIVE |
Format: | Article |
Published: |
Elsevier Ltd
2020
|
Subjects: | |
Online Access: | https://scholarbank.nus.edu.sg/handle/10635/168567 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Patterning light emitting porous silicon using helium beam irradiation
by: Teo, E.J., et al.
Published: (2014) -
An all-silicon channel waveguide fabricated using direct proton beam writing
by: Teo, E.J., et al.
Published: (2014) -
Three-dimensional micromachining of silicon using a nuclear microprobe
by: Teo, E.J., et al.
Published: (2014) -
Micromachining of Silicon via ION Irradiation with Porous Silicon Formation
by: OW YUEH SHENG
Published: (2011) -
Fabrication of patterned porous silicon using high-energy ion irradiation
by: Teo, E.J., et al.
Published: (2014)