Passivation of copper interconnect surfaces with a passivating metal layer
US6468906
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Main Authors: | CHAN, LAP, YAP, KUAN PEI, TEE, KHENG CHOK, IP, FLORA S., LOH, WYE BOON |
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Other Authors: | INSTITUTE OF MICROELECTRONICS |
Format: | Patent |
Published: |
2012
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32617 |
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Institution: | National University of Singapore |
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