A new surface rounding technique for deep submicron CMOS transistor

10th International Symposium on Integrated Circuits, Devices and Systems, ISIC-2004: Integrated Systems on Silicon - Proceedings

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Bibliographic Details
Main Authors: Tat, C.Y., Goh, W.L., Shenp, A.D., Meng, T.K., Samudra, G.S., Hung, C.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68934
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Institution: National University of Singapore

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