A new surface rounding technique for deep submicron CMOS transistor
10th International Symposium on Integrated Circuits, Devices and Systems, ISIC-2004: Integrated Systems on Silicon - Proceedings
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Main Authors: | Tat, C.Y., Goh, W.L., Shenp, A.D., Meng, T.K., Samudra, G.S., Hung, C.L. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/68934 |
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Institution: | National University of Singapore |
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