Modeling of the optical torsion micromirror

Modeling of the optical torsion micromirror

Proceedings of SPIE - The International Society for Optical Engineering

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書目詳細資料
Main Authors:	Zhang, X.M., Chau, F.S., Quan, C., Liu, A.Q.
其他作者:	MECHANICAL & PRODUCTION ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/75040
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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