Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp

Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp

10.1016/j.nimb.2007.02.064

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書目詳細資料
Main Authors:	Dutta, R.K., van Kan, J.A., Bettiol, A.A., Watt, F.
其他作者:	PHYSICS
格式:	Article
出版:	2014
主題:	Electroplating Microlens array Nanoimprinting Lithography PMGI resist Proton beam writing
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/97567
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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