Effect of Acetylene Concentration on Structural Properties of Hydrogenated Amorphous Carbon Films Prepared using Showerhead Plasma Chemical Vapor Deposition

Effect of Acetylene Concentration on Structural Properties of Hydrogenated Amorphous Carbon Films Prepared using Showerhead Plasma Chemical Vapor Deposition

Acetylene/argon plasma was used to deposit hydrogenated amorphous carbon (a-C:H) films using showerhead plasma CVD. The upper electrode was designed like a showerhead to spray gasses onto the grounded electrode and is connected to 10 kHz RF power. The a-C:H films were fabricated with a deposition ti...

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書目詳細資料
Main Authors:	Artit Chingsungnoen, Thananchai Dasri, Phitsanu Poolcharuansin, Anthika Lakhonchai, Nongkhan Tidngim, Pitak Eiamchai, Noppadon Nuntawong, Vittaya Amornkitbamrung
格式:	บทความวารสาร
語言:	English
出版:	Science Faculty of Chiang Mai University 2019
在線閱讀:	http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=9532 http://cmuir.cmu.ac.th/jspui/handle/6653943832/64219
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Chiang Mai University
語言:	English

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