Study of transition metal doping in transparent conductive oxides using magnetron sputtering

• Main Author: Chee, Zhong Quan
• Other Authors: Nripan Mathews
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2020
• Subjects: Engineering::Materials
• Online Access: https://hdl.handle.net/10356/142483
• Institution: Nanyang Technological University

In this report, the fabrication of transition metal doped transparent conductive oxide (TCOs) thin films will be explored. The importance and viability of TCOs will be discussed, followed by the fabrication process and the characterization results. The TCO in this report is the Molybdenum oxide dope...