Characterization of III-V semiconductor materials using rocking curve simulations

• Main Author: Wei, Ya Fei.
• Other Authors: Kam, Chan Hin
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/19560
• Institution: Nanyang Technological University

A windows-based simulation program using Borland C++, named Dynamical Simulation of X-ray Rocking Curves (DSRC), has been developed to calculate high resolution rocking curves for epitaxial layer structures using the fundamental X-ray scattering equations of dynamical diffraction. A bottom-up approa...