Modelling of a mems microphone using wafer bonding technology
111 p.
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Main Author: | Tan, Chee Wee. |
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Other Authors: | Miao Jianmin |
Format: | Theses and Dissertations |
Published: |
2011
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/47130 |
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Institution: | Nanyang Technological University |
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