Modelling of a mems microphone using wafer bonding technology

111 p.

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Bibliographic Details
Main Author: Tan, Chee Wee.
Other Authors: Miao Jianmin
Format: Theses and Dissertations
Published: 2011
Subjects:
Online Access:http://hdl.handle.net/10356/47130
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Institution: Nanyang Technological University

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