Ordered boron nitride thin film growth with reactive magnetron sputtering

• Main Author: Loh, Li Quan
• Other Authors: Teo Hang Tong Edwin
• Format: Final Year Project
• Language: English
• Published: 2017
• Subjects: DRNTU::Engineering::Materials
• Online Access: http://hdl.handle.net/10356/70626
• Institution: Nanyang Technological University

Boron Nitride thin films were deposited on pieces of diced Si wafer using High-power Impulse Magnetron Sputtering (HIPIMS) with a pure boron target. The growth parameters of N2 gas flow ratio and substrate temperature were varied. The thin films were characterised using Fourier Transform Infrared sp...