Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs
10.1109/TDMR.2004.824374
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2014
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sg-nus-scholar.10635-1154302024-11-09T03:27:05Z Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs Tang, L.J. Pey, K.L. Tung, C.H. Radhakrishnan, M.K. Lin, W.H. INSTITUTE OF MICROELECTRONICS Breakdown Dielectric-breakdown-induced epitaxy Gate dielectrics Gate oxide MOSFET 10.1109/TDMR.2004.824374 IEEE Transactions on Device and Materials Reliability 4 1 38-45 2014-12-12T07:15:31Z 2014-12-12T07:15:31Z 2004-03 Conference Paper Tang, L.J., Pey, K.L., Tung, C.H., Radhakrishnan, M.K., Lin, W.H. (2004-03). Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs. IEEE Transactions on Device and Materials Reliability 4 (1) : 38-45. ScholarBank@NUS Repository. https://doi.org/10.1109/TDMR.2004.824374 15304388 http://scholarbank.nus.edu.sg/handle/10635/115430 000220708500007 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Breakdown Dielectric-breakdown-induced epitaxy Gate dielectrics Gate oxide MOSFET |
| spellingShingle |
Breakdown Dielectric-breakdown-induced epitaxy Gate dielectrics Gate oxide MOSFET Tang, L.J. Pey, K.L. Tung, C.H. Radhakrishnan, M.K. Lin, W.H. Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs |
| description |
10.1109/TDMR.2004.824374 |
| author2 |
INSTITUTE OF MICROELECTRONICS |
| author_facet |
INSTITUTE OF MICROELECTRONICS Tang, L.J. Pey, K.L. Tung, C.H. Radhakrishnan, M.K. Lin, W.H. |
| format |
Conference or Workshop Item |
| author |
Tang, L.J. Pey, K.L. Tung, C.H. Radhakrishnan, M.K. Lin, W.H. |
| author_sort |
Tang, L.J. |
| title |
Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs |
| title_short |
Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs |
| title_full |
Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs |
| title_fullStr |
Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs |
| title_full_unstemmed |
Gate Dielectric-Breakdown-Induced Microstructural Damage in MOSFETs |
| title_sort |
gate dielectric-breakdown-induced microstructural damage in mosfets |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/115430 |
| _version_ |
1821187261525393408 |