Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry

10.1016/j.optcom.2006.03.008

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書目詳細資料
Main Authors:	Quan, C., Tay, C.J., Li, M.
其他作者:	MECHANICAL ENGINEERING
格式:	Article
出版:	2014
主題:	Digital filtering Fourier transform Micro-cantilever Micro-electro-mechanical systems Vertical scanning interferometry
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/60554
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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