Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

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書目詳細資料
Main Authors:	Hong, Y.D., Yan, J., Wong, K.M., Yeow, Y.T., Chim, W.K.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/70006
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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