A comparison of defect states in tantalum pentoxide (Ta2O5) films after rapid thermal annealing in O2 or N2O by zero-bias thermally stimulated current spectroscopy
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Review |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81813 |
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| Institution: | National University of Singapore |