Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates

Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates

10.1063/1.1540224

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書目詳細資料
Main Authors:	Samanta, S.K., Chatterjee, S., Maikap, S., Bera, L.K., Banerjee, H.D., Maiti, C.K.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/82555
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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