Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating

Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating

10.1088/0960-1317/16/10/008

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書目詳細資料
Main Authors:	Ansari, K., Van Kan, J.A., Bettiol, A.A., Watt, F.
其他作者:	PHYSICS
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/98014
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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