Thermal confinement of advanced semiconductor substrates during laser annealing
Proceedings - Electrochemical Society
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Main Authors: | Pey, K.L., Ong, K.K., Lee, P.S., Wee, A.T.S., Wang, X.C., Chong, Y.F., Yeo, K.L. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98934 |
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Institution: | National University of Singapore |
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