Process development for moving mechanical assemblies

Moving Mechanical Assemblies could be considered a type of microelectromechanical systems (MEMS) and are usually small integrated devices or systems that combine electrical and mechanical components. They range in size from the millimeter level to the submicron level, usually with a moving or sus...

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Bibliographic Details
Main Author: Tay, Beng Kang
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Language:English
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/14533
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Institution: Nanyang Technological University
Language: English

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