Process development for moving mechanical assemblies
Moving Mechanical Assemblies could be considered a type of microelectromechanical systems (MEMS) and are usually small integrated devices or systems that combine electrical and mechanical components. They range in size from the millimeter level to the submicron level, usually with a moving or sus...
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Main Author: | Tay, Beng Kang |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Research Report |
Language: | English |
Published: |
2008
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/14533 |
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Institution: | Nanyang Technological University |
Language: | English |
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